Dynamic Slingshot Operation for Low-Operation- Voltage Nanoelectromechanical (NEM) Memory Switches
نویسندگان
چکیده
منابع مشابه
Low voltage nanoelectromechanical switches based on silicon carbide nanowires.
We report experimental demonstrations of electrostatically actuated, contact-mode nanoelectromechanical switches based on very thin silicon carbide (SiC) nanowires (NWs). These NWs are lithographically patterned from a 50 nm thick SiC layer heteroepitaxially grown on single-crystal silicon (Si). Several generic designs of in-plane electrostatic SiC NW switches have been realized, with NW widths...
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ژورنال
عنوان ژورنال: IEEE Access
سال: 2020
ISSN: 2169-3536
DOI: 10.1109/access.2020.2985105